JPH0432974B2 - - Google Patents
Info
- Publication number
- JPH0432974B2 JPH0432974B2 JP59098862A JP9886284A JPH0432974B2 JP H0432974 B2 JPH0432974 B2 JP H0432974B2 JP 59098862 A JP59098862 A JP 59098862A JP 9886284 A JP9886284 A JP 9886284A JP H0432974 B2 JPH0432974 B2 JP H0432974B2
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- fluid flow
- substrate
- channel
- thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012530 fluid Substances 0.000 claims abstract description 175
- 239000004065 semiconductor Substances 0.000 claims abstract description 12
- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 11
- 238000005259 measurement Methods 0.000 claims description 117
- 239000000758 substrate Substances 0.000 claims description 77
- 238000010438 heat treatment Methods 0.000 claims description 40
- 238000000034 method Methods 0.000 claims description 32
- 239000000463 material Substances 0.000 claims description 28
- 239000012212 insulator Substances 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 239000004020 conductor Substances 0.000 claims description 10
- 239000000835 fiber Substances 0.000 claims description 9
- 239000013529 heat transfer fluid Substances 0.000 claims description 8
- 239000012777 electrically insulating material Substances 0.000 claims description 7
- 238000004544 sputter deposition Methods 0.000 claims description 7
- 210000003298 dental enamel Anatomy 0.000 claims description 6
- 238000004070 electrodeposition Methods 0.000 claims description 6
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 238000009413 insulation Methods 0.000 claims description 5
- 238000007738 vacuum evaporation Methods 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 4
- 239000011491 glass wool Substances 0.000 claims description 3
- 239000011490 mineral wool Substances 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 238000001771 vacuum deposition Methods 0.000 claims description 2
- 239000010410 layer Substances 0.000 claims 19
- 239000011888 foil Substances 0.000 claims 2
- 239000012790 adhesive layer Substances 0.000 claims 1
- 238000003698 laser cutting Methods 0.000 claims 1
- 238000003754 machining Methods 0.000 claims 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 16
- 229910052759 nickel Inorganic materials 0.000 description 8
- 239000007788 liquid Substances 0.000 description 6
- 239000010408 film Substances 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000010409 thin film Substances 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000006261 foam material Substances 0.000 description 2
- -1 polyethylene Polymers 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 229920005830 Polyurethane Foam Polymers 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 210000004209 hair Anatomy 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000011496 polyurethane foam Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
- G01F1/692—Thin-film arrangements
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
- Paper (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL8301765 | 1983-05-18 | ||
| NL8301765 | 1983-05-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59231417A JPS59231417A (ja) | 1984-12-26 |
| JPH0432974B2 true JPH0432974B2 (en]) | 1992-06-01 |
Family
ID=19841875
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59098862A Granted JPS59231417A (ja) | 1983-05-18 | 1984-05-18 | 流体流れ測定装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4616505A (en]) |
| EP (1) | EP0131318B1 (en]) |
| JP (1) | JPS59231417A (en]) |
| AT (1) | ATE70911T1 (en]) |
| DE (1) | DE3485381D1 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018100691A1 (ja) | 2016-11-30 | 2018-06-07 | Ykk株式会社 | スライドファスナー用スライダー |
Families Citing this family (46)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2173905A (en) * | 1985-04-12 | 1986-10-22 | Radyne Ltd | Fluid-flow monitoring apparatus |
| AT396998B (de) * | 1985-12-09 | 1994-01-25 | Ottosensors Corp | Messeinrichtungen und rohranschluss sowie verfahren zur herstellung einer messeinrichtung und verfahren zur verbindung von rohren mit einer messeinrichtung bzw. zur herstellung von rohranschlüssen |
| CA1255923A (en) * | 1985-12-23 | 1989-06-20 | Dimitri Petrov | Non-obstructive thermodynamic flow meter |
| JPS6385364A (ja) * | 1986-09-29 | 1988-04-15 | Sharp Corp | フローセンサ |
| DE3713981A1 (de) * | 1987-04-27 | 1988-11-17 | Robert Buck | Waermeuebergangsmessgeraet, insbesondere stroemungswaechter |
| DE3905524A1 (de) * | 1989-02-23 | 1990-08-30 | Weber Guenther | Elementanordnung fuer kalorimetrische stroemungssensoren |
| DE4005227A1 (de) * | 1990-02-20 | 1991-08-22 | Friedrich Hoersch | Flusswaechter |
| FR2670579A1 (fr) * | 1990-12-14 | 1992-06-19 | Schlumberger Ind Sa | Capteur semi-conducteur de debit. |
| US5259243A (en) * | 1991-01-04 | 1993-11-09 | Dxl International, Inc. | Flow sensor |
| US5189910A (en) * | 1991-04-26 | 1993-03-02 | Honda Engineering Co., Ltd. | Fluid speed measuring probe |
| US5682899A (en) * | 1991-05-16 | 1997-11-04 | Ami-Med Corporation | Apparatus and method for continuous cardiac output monitoring |
| DE4219551C2 (de) * | 1991-06-13 | 1996-04-18 | Mks Japan Inc | Massenströmungssensor |
| JP2643665B2 (ja) * | 1991-06-13 | 1997-08-20 | 日本エム・ケー・エス 株式会社 | 流量センサ |
| DE4335332A1 (de) * | 1993-10-18 | 1995-04-20 | Bitop Gmbh | Verfahren und Vorrichtung zur insbesondere nicht invasiven Ermittlung mindestens eines interessierenden Parameters eines Fluid-Rohr-Systems |
| US5509424A (en) * | 1994-01-28 | 1996-04-23 | Aws Salim Nashef | Continuous cardiac output monitoring system |
| RU2125242C1 (ru) * | 1995-11-15 | 1999-01-20 | Ракетно-космическая корпорация "Энергия" им.С.П.Королева | Способ определения расхода и датчик для измерения расхода |
| US5792952A (en) * | 1996-05-23 | 1998-08-11 | Varian Associates, Inc. | Fluid thermal mass flow sensor |
| DE69709132T2 (de) * | 1997-12-30 | 2002-07-18 | Qualiflow S.A., Montpellier | Verfahren zur Schaffung eines Mikro-Thermoelement-Sensors für die Massendurchflussmessung und entsprechende Vorrichtung dazu |
| ATE222354T1 (de) * | 1997-12-30 | 2002-08-15 | Qualiflow S A | Verfahren zu herstellung von einem sensor für einen thermischen massendurchflussmesser |
| DE19808248A1 (de) * | 1998-02-27 | 1999-09-02 | Pierburg Ag | Meßvorrichtung zur Messung der Masse eines strömenden Mediums |
| US6208254B1 (en) * | 1999-09-15 | 2001-03-27 | Fluid Components Intl | Thermal dispersion mass flow rate and liquid level switch/transmitter |
| EP1279008B1 (de) * | 2000-05-04 | 2005-08-10 | Sensirion AG | Flusssensor für flüssigkeiten |
| JP3754678B2 (ja) * | 2003-04-16 | 2006-03-15 | 株式会社フジキン | 耐食金属製熱式質量流量センサとこれを用いた流体供給機器 |
| NL1023404C2 (nl) * | 2003-05-13 | 2004-11-16 | Berkin Bv | Inrichting voor het regelen van het massadebiet van een vloeistofstroom in een vloeistofkanaal. |
| JP2005300187A (ja) * | 2004-04-06 | 2005-10-27 | Keyence Corp | 分流式流量センサ装置 |
| JP4079116B2 (ja) * | 2004-04-30 | 2008-04-23 | オムロン株式会社 | 流量計 |
| US7181963B2 (en) * | 2004-06-30 | 2007-02-27 | Codman & Shurtleff, Inc | Thermal flow sensor having streamlined packaging |
| US20060000272A1 (en) * | 2004-06-30 | 2006-01-05 | Beat Neuenschwander | Thermal flow sensor having an asymmetric design |
| US7036369B2 (en) * | 2004-06-30 | 2006-05-02 | Codman & Shurtleff, Inc. | Thermal flow sensor having recesses in a substrate |
| US7069779B2 (en) * | 2004-06-30 | 2006-07-04 | Codman & Shurtleff, Inc. | Thermal flow sensor having an inverted substrate |
| DE502005001562D1 (de) * | 2004-10-25 | 2007-11-08 | Alstom Technology Ltd | Vorrichtung zur schnellen Messung von Temperaturen in einem Heissgasstrom |
| US7331224B2 (en) * | 2004-12-07 | 2008-02-19 | Honeywell International Inc. | Tilt-insensitive flow sensor |
| US7755466B2 (en) | 2006-04-26 | 2010-07-13 | Honeywell International Inc. | Flip-chip flow sensor |
| JP4888040B2 (ja) * | 2006-10-18 | 2012-02-29 | 株式会社島津製作所 | 熱式質量流量計 |
| JP4940938B2 (ja) * | 2006-12-25 | 2012-05-30 | 株式会社島津製作所 | 熱式質量流量計 |
| US8850872B2 (en) | 2009-05-08 | 2014-10-07 | Opw Fuel Management Systems, Inc. | Line leak detector and method of using same |
| US8316695B2 (en) * | 2009-05-08 | 2012-11-27 | Delaware Capital Formation, Inc. | Line leak detector and method of using same |
| US9429548B2 (en) * | 2009-12-18 | 2016-08-30 | Waters Technologies Corporation | Flow sensors and flow sensing methods with extended linear range |
| US10107662B2 (en) | 2015-01-30 | 2018-10-23 | Honeywell International Inc. | Sensor assembly |
| EP3233498B1 (en) | 2015-04-30 | 2019-06-26 | Hewlett-Packard Development Company, L.P. | Microfluidic flow sensor |
| DE102016116101A1 (de) * | 2016-08-30 | 2018-03-01 | Innovative Sensor Technology Ist Ag | Sensorelement und thermischer Strömungssensor zur Messung einer physikalischen Größe eines Messmediums |
| US10409295B2 (en) * | 2016-12-31 | 2019-09-10 | Applied Materials, Inc. | Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS) |
| DE102017120941B4 (de) | 2017-09-11 | 2025-04-30 | Endress + Hauser Wetzer Gmbh + Co. Kg | Thermisches Durchflussmessgerät und Verfahren zum Betreiben eines thermischen Durchflussmessgeräts |
| EP3762688A4 (en) | 2018-03-06 | 2021-12-08 | Ezmems Ltd. | DIRECT IMPLEMENTATION OF SENSORS IN TUBES |
| DE102018130547A1 (de) * | 2018-11-30 | 2020-06-04 | Innovative Sensor Technology Ist Ag | Sensorelement, Verfahren zu dessen Herstellung und thermischer Strömungssensor |
| JP2021131323A (ja) * | 2020-02-20 | 2021-09-09 | サーパス工業株式会社 | 流量計および流量計の製造方法 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE475239A (en]) * | 1946-05-21 | 1900-01-01 | ||
| US3336804A (en) * | 1964-03-09 | 1967-08-22 | Heinz F Poppendiek | Means and techniques useful in fluid flow determinations |
| US3438254A (en) * | 1965-10-19 | 1969-04-15 | United Control Corp | Fluid flow detector |
| GB1414112A (en) * | 1973-07-23 | 1975-11-19 | Tylan Corp | Mass flow meter |
| US3931736A (en) * | 1974-06-28 | 1976-01-13 | Rca Corporation | Improved fluid flow sensor configuration |
| US4160969A (en) * | 1976-12-27 | 1979-07-10 | The Garrett Corporation | Transducer and method of making |
| DE2925975A1 (de) * | 1979-06-27 | 1981-01-15 | Siemens Ag | Mengendurchflussmesser |
| FR2468887A1 (fr) * | 1979-11-06 | 1981-05-08 | Renault | Debimetre thermique pour fluide |
| DE3006584A1 (de) * | 1980-02-22 | 1981-09-03 | Degussa Ag, 6000 Frankfurt | Thermischer durchflussmesser |
| US4471647A (en) * | 1980-04-18 | 1984-09-18 | Board Of Regents Of Stanford University | Gas chromatography system and detector and method |
| US4335605A (en) * | 1980-05-14 | 1982-06-22 | Thermal Instrument Company | Mass flow meter |
| DE3115656A1 (de) * | 1981-04-18 | 1982-11-18 | Robert Bosch Gmbh, 7000 Stuttgart | Elektrischer widerstand mit mindestens einer auf einem traeger aufgebrachten widerstandsschicht und verfahren zur herstellung eines elektrischen widerstandes |
-
1984
- 1984-05-17 EP EP84200722A patent/EP0131318B1/en not_active Expired - Lifetime
- 1984-05-17 AT AT84200722T patent/ATE70911T1/de not_active IP Right Cessation
- 1984-05-17 DE DE8484200722T patent/DE3485381D1/de not_active Expired - Lifetime
- 1984-05-18 US US06/611,598 patent/US4616505A/en not_active Expired - Lifetime
- 1984-05-18 JP JP59098862A patent/JPS59231417A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018100691A1 (ja) | 2016-11-30 | 2018-06-07 | Ykk株式会社 | スライドファスナー用スライダー |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0131318B1 (en) | 1991-12-27 |
| ATE70911T1 (de) | 1992-01-15 |
| US4616505A (en) | 1986-10-14 |
| EP0131318A1 (en) | 1985-01-16 |
| JPS59231417A (ja) | 1984-12-26 |
| DE3485381D1 (de) | 1992-02-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |